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SILICONE RUBBER IMPLANT ESC

Are you facing backside particles in your implant tools?

 

You can improve that with our new innovative ESCs for less backside particles in your implant process.

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Implant Rubber ESC front and back

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Connector changes between OEM and SPM improved ESC. Wire cable is removed, and direct contact is used. 

Get access to a free checklist with helpful insights on running an ESC.

Advantages:

  • Improved particle control (Wafer backside particles < 10,000)

  • Improved mechanical strength in clamping electrode connection points

  • The improved lifetime in comparison with OEM

  • Reliable wafer clamping consistency

After a long time of usage, also repair of the implant ESC, with changing all connections and top surface, is possible.

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Structure of the improved ESC

Get access to our free PDF file to learn more about the function of Electrostatic-chucks, the advantages or disadvantages of the different types.

Keyboard and Mouse

Let's comunicate!

For all the further information please contact Philipp Quaderer via mail: philipp@spm.li or via Phone: +4237928027.

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