SILICONE RUBBER IMPLANT ESC
Are you facing backside particles in your implant tools?
You can improve that with our new innovative ESCs for less backside particles in your implant process.
Implant Rubber ESC front and back
Connector changes between OEM and SPM improved ESC. Wire cable is removed, and direct contact is used.
Improved particle control (Wafer backside particles < 10,000)
Improved mechanical strength in clamping electrode connection points
The improved lifetime in comparison with OEM
Reliable wafer clamping consistency
After a long time of usage, also repair of the implant ESC, with changing all connections and top surface, is possible.
Structure of the improved ESC