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    SPARE PARTS

    You come with an idea, we jump with the solution.

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    Your high demands can be met with quality spare parts, which improve your yield and lower your costs.

    RF Generators Trumpf Hüttinger
    RF Generators Trumpf Hüttinger

    Semiconductor Spare Parts

    Photochucks
    Photochucks

    Photochucks

    Metrology equipment spare parts
    Metrology equipment spare parts

    Metrology equipment spare parts

    Groundstraps
    Groundstraps

    Groundstraps

    N2 Injection System
    N2 Injection System

    N2 Injection System

    G-None Pad
    G-None Pad

    G-None Pad

    Heating Jackets
    Heating Jackets

    Heating Jackets

    O-rings
    O-rings

    O-rings

    Optical Parts
    Optical Parts

    Semiconductor spare parts

    Yttria Coating
    Yttria Coating
    Storage and Transportation Boxes
    Storage and Transportation Boxes

    Semiconductor Spare Parts

    Stepper Parts Repair
    Stepper Parts Repair

    Repair service

    Rubber Implant ESC
    Rubber Implant ESC

    Rubber Implant ESC

    Tension Lock Clamp
    Tension Lock Clamp

    Tension Lock Clamp

    SPM Wet Clean Improved ESC
    SPM Wet Clean Improved ESC

    Semiconductor Spare Parts

    Centerrings
    Centerrings

    Safest solution for a good sealing of your foreline

    AIF Shower Head
    AIF Shower Head

    Fluorune plasma source improvement

    Micro Fittings
    Micro Fittings

    From Fittings to Gassticks

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    +423 375 80 20

    sales@spm.li

    Bendererstrasse 29

    9494 Schaan I Liechtenstein