SPARE PARTS

You come with an idea, we jump with the solution.

Your high demands can be met with quality spare parts, which improve your yield and lower your costs.

RF Generators Trumpf Hüttinger
Semiconductor Spare Parts
Photo Chucks
Photo chucks
Metrology equipment spare parts
Metrology equipment spare parts
Groundstraps
Groundstraps
N2 Injection System
N2 Injection System
G-None Pad
G-None Pad
Heating Jackets
Heating Jackets
O-rings
O-rings
Optical Parts
Semiconductor spare parts
Yttria Coating
Storage and Transportation Boxes
Semiconductor Spare Parts
New Heaters
Semiconductor Spare Parts
Stepper Parts Repair
Repair service
Rubber Implant ESC
Rubber Implant ESC
Tension Lock Clamp
Tension Lock Clamp
SPM Wet Clean Improved ESC
Semiconductor Spare Parts
Centerrings
Safest solution for a good sealing of your foreline
AIF Shower Head
Fluorune plasma source improvement
Micro Fittings
From Fittings to Gassticks
Show More
Contact Us