SPARE PARTS
You come with an idea, we jump with the solution.
Your high demands can be met with quality spare parts, which improve your yield and lower your costs.
RF Generators Trumpf Hüttinger
Semiconductor Spare PartsPhoto Chucks
Photo chucksMetrology equipment spare parts
Metrology equipment spare partsGroundstraps
GroundstrapsN2 Injection System
N2 Injection SystemG-None Pad
G-None PadHeating Jackets
Heating JacketsO-rings
O-ringsOptical Parts
Semiconductor spare partsYttria Coating
Storage and Transportation Boxes
Semiconductor Spare PartsNew Heaters
Semiconductor Spare PartsStepper Parts Repair
Repair serviceHeater Repair
Heater RepairRubber Implant ESC
Rubber Implant ESCTension Lock Clamp
Tension Lock ClampSPM Wet Clean Improved ESC
Semiconductor Spare PartsCenterrings
Safest solution for a good sealing of your forelineAIF Shower Head
Fluorune plasma source improvementMicro Fittings
From Fittings to GassticksShow More