SILICON SPUTTERING TARGETS
SPM produces monocrystalline and polycrystalline silicon sputtering targets in a variety of shapes and forms, customized to your specific needs. With 20 years of experience in silicon production, we offer unique sputtering target materials and a reliable bonding service. We start our production process by examining your used sputtering target to better understand your specific obstacles and to tailor you a solution best matching your needs.
We found a way to bond the targets in order that the long single tile targets do not crack.
See on the pictures below targets with the conventional type of bonding and also with our way of bonding.
We see if there are cracks in the material, or if there is a lot of redeposition causing particles in the process or if maybe the backing plate could be operated with cheaper or harder material.
We receive used targets from our customer
Analyze with the customer their issues: material, shape, size of tiles, backing plates, surface finish, edge shape
See what can be done to get higher productivity or yield at the same or even better costs
Flat / Planar