SILICON SPUTTERING TARGETS

SPM produces monocrystalline and polycrystalline silicon sputtering targets in a variety of shapes and forms, customized to your specific needs.  With 20 years of experience in silicon production, we offer unique sputtering target materials and a reliable bonding service. We start our production process by examining your used sputtering target to better understand your specific obstacles and to tailor you a solution best matching your needs.

We found a way to bond the targets in order that the long single tile targets do not crack.

 

See on the pictures below targets with the conventional type of bonding and also with our way of bonding.

We see if there are cracks in the material, or if there is a lot of redeposition causing particles in the process or if maybe the backing plate could be operated with cheaper or harder material.

ENGINEERING PROCESSES

We receive used targets from our customer

Analyze with the customer their issues: material, shape, size of tiles, backing plates, surface finish, edge shape​

See what can be done to get higher productivity or yield at the same or even better costs

Monocrystalline Material

Polycrystalline Material:

Shapes:

 

  • Tube style

  • Flat / Planar

  • Round

Keyboard and Mouse

Let's comunicate!

For all the further information please contact Michael Junker via mail: michael@spm.li or via Phone: +4237945791.