RF POWER METER

Discover the power of combined experience and innovation.

Your goal is to make sure your chamber produces wafers within the specification.

?

What can you do if you have chamber to chamber variations?

Do you really trust the value your RF Generator shows?

 

 

WE HAVE A SOLUTION FOR YOU

Tegam developed a new RF Power and traceable sensor Meter with an unprecedented ±0.5% accuracy at calibrated frequencies, ±1% across frequency, and power range (at 2-sigma). With an easy install between the RF Generator and RF Match, you will be able to track what is going on.

DATA ACQUISITION SOFTWARE

The Tegam RF Power Meter supports you with the following capabilities:

Measurement at a glance

Forward and Reverse Power and frequency simultaneously

displayed on a large, easy to read OLED display.

Mobile

Powered by a standard 500 mA port, external battery, or AC power outlet using the shelf adapters.

Flexible

Take measurements directly from the meter or connect to a PC to collect measurement data using the included software.

Confidence

This highly accurate RF Powermeter allows you to be

confident that your process works.

Keyboard and Mouse

Let's comunicate!

If you want to have a technical presentation, please contact Daniel Bernegger via mail: daniel@spm.li or via phone: +423 375 8028.