RF POWER METER
Discover the power of combined experience and innovation.
Your goal is to make sure your chamber produces wafers within the specification.
What can you do if you have chamber to chamber variations?
Do you really trust the value your RF Generator shows?
WE HAVE A SOLUTION FOR YOU
Tegam developed a new RF Power and traceable sensor Meter with an unprecedented ±0.5% accuracy at calibrated frequencies, ±1% across frequency, and power range (at 2-sigma). With an easy install between the RF Generator and RF Match, you will be able to track what is going on.
DATA ACQUISITION SOFTWARE
The Tegam RF Power Meter supports you with the following capabilities:
Measurement at a glance
Forward and Reverse Power and frequency simultaneously
displayed on a large, easy to read OLED display.
Powered by a standard 500 mA port, external battery, or AC power outlet using the shelf adapters.
Take measurements directly from the meter or connect to a PC to collect measurement data using the included software.
This highly accurate RF Powermeter allows you to be
confident that your process works.