Optical Parts for Steppers
Optical components for Nikon, Canon and ASML stepper.
All optical parts you find at SPM enable you to reduce your cost. Not only you save money buying the products low priced, but you also can use them longer in your process. Due to a special manufacturing process the life cycle of the optical components is enhanced and hence reduces your demand for replacement.
SPM offers amongst others the following optical components for Nikon stepper:
I-Line reflection mirrors
Collector lens unit
Main interference filter
SPM provides the following optical components for Canon stepper:
Furthermore, you find the Fine Reticlement Alignment (FRA) for various FPA Canon Steppers at SPM.
The FRA replaces several parts such as lenses, mirrors and I-Line filter located in the AA/FRA unit. It uses a short-wavelength I-Line laser diode of 365 nm with a longer lifetime for steady reticle alignment. You can save time and money with the FRA!