New Life For Old Heaters Typical Repairs
Your obsolete heaters can be refurbished with a new top AlN ceramic surface and restored to a new life cycle.
200mm heater with facelift repair
300mm vacuum heater with facelift repair
HEATER REPAIR PROCESS
1. The old damaged ceramic surface is removed by grinding. All ceramic above RF antenna and RF antenna are ground away.
2. The new ceramic plate is bonded to the heater plate.
3. New wafer pocket, embossing, vacuum grooving, and holes are ground into heater surface.
4. Our bonding material replaces the RF antenna function, with improved dielectric thickness control.
HEATER REPAIR BENEFITS