HEATER REPAIR

New Life For Old Heaters Typical Repairs

Your obsolete heaters can be refurbished with a new top AlN ceramic surface and restored to a new life cycle.

200mm heater with facelift repair

300mm vacuum heater with facelift repair

HEATER REPAIR PROCESS

1. The old damaged ceramic surface is removed by grinding. All ceramic above RF antenna and RF antenna are ground away.

2. The new ceramic plate is bonded to the heater plate.

 

3. New wafer pocket, embossing, vacuum grooving, and holes are ground into heater surface.

 

4. Our bonding material replaces the RF antenna function, with improved dielectric thickness control.

BENEFITS

Shorten

lead time

Keyboard and Mouse

Facelift heaters can be refurbished as many times as a new heater

Good

cost saving

Let's comunicate!

For all the further information please contact Philipp Quaderer via mail: philipp@spm.li or via Phone: +4237928027.