Yield Improvement With Improved CVD Showerheads

Updated: Jun 24


One of our newest products we offer are Aluminium showerheads where we implanted N2

There are 2 main benefits for our customers:

1) less particles

2) longer lifetime without changing your process parameters.

Please contact us: philipp@spm.li to learn more about this.


#CVD #Showerhead #Yieldimprovement

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