Yield Improvement With Improved CVD Showerheads
- Philipp Quaderer
- Nov 6, 2016
- 1 min read
Updated: Jun 24, 2021
One of our newest products we offer are Aluminium showerheads where we implanted N2
There are 2 main benefits for our customers:
1) less particles
2) longer lifetime without changing your process parameters.
Please contact us: philipp@spm.li to learn more about this.

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