PAMS – Super Fast Real-Time
Optical Plasma & Arc Monitoring System
PAMS is a plasma Monitoring System, crated to solve manufacturing issues. The innovational optical system is able to detect ARC due to the high-speed sample rate in real-time. Immediately detects irregularity of plasma and invisible micro arcing with 250KHZ @ 16-bit resolution. That gives the possibility to find abnormality in-process and prevent:
Bad film properties
If one of the measured parameters (gas flow, pressure, RF network, temperature, state of chamber parts, etc.) is in abnormal status, the signal from plasma light is eventually shown as different and our high-speed emission detector can immediately catch it up.
Plug and play installation on view port does not affect the process. User-oriented software with effective filter data and intuitive algorithm.
Excellent results compare with OES, made PAMS competitive at the Asian mass market.
Please contact Philipp Quaderer via mail: firstname.lastname@example.org or via Phone: +4237928027