PAMS – Super Fast Real Time Optical Plasma & Arc Monitoring System
PAMS is a plasma Monitoring System, crated to solve manufacturing issues. Innovational optical system is able to detect ARC due to high speed sample rate in real time. Immediatly detects irregularity of plasma and invisible micro arcing with 250KHZ @ 16 bit resolution. That gives posibility to find abnormality in process and prevent:
Bad film properties
If one of measured parameters (gasflow, pressure, RF network, temperature, state of chamber parts etc.) is in abnormal status, the signal from plasma light is eventually shown as different and our high speed emission detector can immediately catch it up.
Plug and play installation on view port does not affect the process. User oriented software with effective filter data and intuitive algorithm.
Excellent results compare with OES, made PAMS competitive at Asian mass market.
Please contact Philipp Quaderer via mail: email@example.com or via Phone: +4237928027