N2 INJECTION SYSTEM

Optimize your suction force and prevent clogging of exhaust lines

Are you facing problems with clogged forelines and exhaust lines?

Would you like to decrease maintenance at your vacuum lines and extend the time between PMs?

You will be able to achieve this with the hot N2 injection system.

The Hot N2 injection system size is identical to your pipe size. Horizontal N2 flow has no gas resistance on the way and no chance to swirl.

 

Advantages:

  • No more clogging in the exhaust line

  • Suction force reduces the pump load

  • Increase the MTBC of exhaust

  • Reduces pump electrical power consumption

POSITIVE REFERENCES FROM OUR CUSTOMERS

Photos before and after installation of the N2 injection system on the CVD tool after 60 days

Photos before and after N2 injection system installation on Diffusion tool after 13 days

Keyboard and Mouse

Let's comunicate!

For all the further information please contact Philipp Quaderer via mail: philipp@spm.li or via Phone: +4237928027.