N2 INJECTION SYSTEM
Optimize your suction force and prevent clogging of exhaust lines
Are you facing problems with clogged forelines and exhaust lines?
Would you like to decrease maintenance at your vacuum lines and extend the time between PMs?
You will be able to achieve this with the hot N2 injection system.
The Hot N2 injection system size is identical to your pipe size. Horizontal N2 flow has no gas resistance on the way and no chance to swirl.
No more clogging in the exhaust line
Suction force reduces the pump load
Increase the MTBC of exhaust
Reduces pump electrical power consumption
POSITIVE REFERENCES FROM OUR CUSTOMERS
Photos before and after installation of the N2 injection system on the CVD tool after 60 days
Photos before and after N2 injection system installation on Diffusion tool after 13 days