New Life For Old Heaters Typical Repairs
300mm BPSG vacuum heater with facelift repair
200mm heater with facelift repair
Heaters from CRC Inc. mainly for CVD and etch processes.
The heaters are made out of ceramic or aluminium. The temperature range starts at approximately 200°C with some applications going up to 850°C. Substrate sizes are between 150 and 300 mm (5.9 – 11.8 inch).
SPMs Heater product range:
300 mm: Ceramic and Aluminium Heater
200 mm: Ceramic and Aluminium Heater
150 mm: Ceramic and Aluminium Heater
More Chucks & Components
Special designs, e.g. ceramic-metal-compounds
Special surface structures and coatings
Refurbishment of parts such as temperature pobes
Please contact Philipp Quaderer via mail: firstname.lastname@example.org or via Phone: +4237928027