We started to introduce this new product about 6 months ago and the customers who tested and installed it see a great improvement in their uptime and much less maintenance work required. X-Hot is installed after the pump. A small heater heats the N2 up to 150 Degree C. With very sophisticated designed Nozzles the N2 gets accelerated into the Foreline. The sucking force is keeping the exit of the pump nice and clean. The pressure of the pump is the main indicator if the foreli

One of our newest products we offer are Aluminium showerheads where we implanted N2 There are 2 main benefits for our customers: 1) less particles 2) longer lifetime without changing your process parameters. Please contact us: philipp@spm.li to learn more about this. #CVD #Showerhead #Yieldimprovement