March 26, 2018
March 7, 2018
Dr. Thomas Gischkat from RhySearch contacted us with the idea if we can bond a Silicon Target with an Aluminium inlet together.
His idea is to co-sputter these 2 materials to get special properties which nobody achieved so far.
November 16, 2016
Most of us know that a real arc can disrupt our process and chamber parts which results in a measureable loss.
But do you know the impact of micro arcs and the influence on your process?
How could you measure micro arcs? Which solutions exist on the market?
November 13, 2016
We started to introduce this new product about 6 months ago and the customers who tested and installed it see a great improvement in their uptime and much less maintenance work required.
X-Hot is installed after the pump. A small heater heats the N2 up to 150 Degree C....
November 6, 2016
One of our newest products we offer are Aluminium showerheads where we implanted N2
There are 2 main benefits for our customers:
1) less particles
2) longer lifetime without changing your process parameters.
Please contact us: email@example.com
to learn more about this
November 5, 2016
Many of our customers are using Ceramic CVD heaters. They had 2 topics where we were not able to help, but found thanks to DJ Chang a great solution:
The new product is called HEMOS and allows you to measure the film thickness while you are processing the wafers in your...
Wir suchen einen neuen Office Manager!
March 18, 2019
Custom made Thermo Couple wafers
Si-Al Combination Target
We are ISO Certified!
September 15, 2017
Environmental friendly Photoresist Remover from Dynaloy
November 25, 2016
Detect Micro-arcs in your Plasma chamber
Clogged Forelines? More uptime, X-Hot keeps your foreline clean.
Yield improvement with improved CVD Showerheads
New product to monitor the insitu coating thickness and heater health on a CVD process
APCM Conference in Reutlingen
April 14, 2016
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