AIF SHOWER HEAD

Is your CVD process often stopped because of particle contamination?

Does your showerhead lifetime drastically drop, due to haunting issues?

Are you confronting with accumulated fluorine and corroded pin holes?

Shower head issues after long time exposure under hard process circumstances

Implantation 10-700 microns. (No new layer is added).

Pinhole effect

AIF Shower head advantages you can gain:

  • Uniformity of the surface thickness

  • Corrosion protection from process gases (F, Cl, O2) and chemicals

  • Double lifetime (Plasma resistance/chemical resistance)

  • Dry etch rate increased 3 times

  • Less abradable surface

  • Plug and play (no process change)

  • Yield Improvement (Less arcs, no cracks, less Particles)

Keyboard and Mouse

Let's comunicate!

For all the further information please contact Philipp Quaderer via mail: philipp@spm.li or via Phone: +4237928027.