AIF SHOWER HEAD
Is your CVD process often stopped because of particle contamination?
Does your showerhead lifetime drastically drop, due to haunting issues?
Are you confronting with accumulated fluorine and corroded pin holes?
AIF Shower head issues after long time exposure under hard process circumstances
Implantation 10-700 microns. (No new layer is added).
AIF SHOWER HEAD ADVANTAGES
Uniformity of the surface thickness
Corrosion protection from process gases (F, Cl, O2) and chemicals
Double lifetime (Plasma resistance/chemical resistance)
Dry etch rate increased 3 times
Less abradable surface
Plug and play (no process change)
Yield Improvement (less arcs, no cracks, less particles)