AIF SHOWER HEAD

Is your CVD process often stopped because of particle contamination?

Does your showerhead lifetime drastically drop, due to haunting issues?

Are you confronting with accumulated fluorine and corroded pin holes?

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AIF Shower head issues after long time exposure under hard process circumstances

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Implantation 10-700 microns. (No new layer is added).

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Pinhole effect

AIF SHOWER HEAD ADVANTAGES

                          Uniformity of the surface thickness

                          Corrosion protection from process gases (F, Cl, O2) and chemicals

                          Double lifetime (Plasma resistance/chemical resistance)

                          Dry etch rate increased 3 times

                          Less abradable surface

                          Plug and play (no process change)

                          Yield Improvement (less arcs, no cracks, less particles)

Keyboard and Mouse

Let's comunicate!

For all the further information please contact Philipp Quaderer via mail: philipp@spm.li or via Phone: +4237928027.