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Silicon
SPM offers mono- and polycrystalline Silicon sputtering targets in various sizes and shapes. Flat surfaces can be polished, domes and lenses can be shaped.
Monocrystalline Material:
| Diameter: | up to 450 mm (17.7") |
| Standard Diameter: | 305 - 2.54 mm (12" - 0.1") |
| Length: | up to 1'500 mm (59") (max Ingot Length) |
| p-Type, n-Type: | both available |
| Resistance region: | 0.005 - 0.02 Ohmxcm or high resistance 5 - 10k Ohm |
| Purity: | > 6 N |
Polycrystalline Material:
| Diameter: | up to 500 mm (19") |
| Length: | up to 800 mm (31.5") |
| Max plate size: | 500 x 500 mm (19" x 19") |
| p-Type | Boron doped |
| Resistance region: | 0.005 - 0.02 Ohm x cm or 0.5 - 2.0 Ohmxcm |
| Purity: | > 6 N |
Shapes:
- Tube style
- Flat / Planar
- Round
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© 2012 SPM AG Benderer Strasse 29 : 9494 Schaan : Liechtenstein : +423 375 80 20 : sales@spm.li
Print Version | Sitemap | Recommend this site!© 2012 SPM AG Benderer Strasse 29 : 9494 Schaan : Liechtenstein : +423 375 80 20 : sales@spm.li
Messen / Trade Shows
| May 2012 | ||
| 15.-17. |
E-MRS |
Strasbourg, France |
| 22.-25. |
OPTATEC |
Frankfurt, Germany |
| June 2012 | ||
| 19.-21. |
Lope-C |
Munich, Germany |
|
September 2012 |
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| 11.-12. |
PSE 2012 |
Garmisch-Partenkirchen, Germany |
