PZT

PZT is short for Pb(Zr,Ti)O3 and is a ceramic material used for production of efficient piezo actuators.

The manufacturing process of SPM has three additional steps compared to the normal manufacturing process of PZT material. The steps 3 - 5 are unique to SPM and make the difference:

• fewer nodules and particles
• high stability, homogeneity and uniformity
• higher sputtering rate

The PZT material is available in the following composition:

• Pb: 1.0 -1.3
• Zr, Ti: composition available according to your specification