Refurbishment

Trikon ESC

SPM refurbishes your electrostatic chuck (ESC). The following steps are carried out for reburbishing: 

  • Income inspection and tracking
  • Refurbishment of metal pedestal
  • New ESC ceramic sandwich
  • Final testing

 

 

P/C chucks & susceptors

P/C Chuck

SPM refurbishes your P/C chucks and susceptors.

 

The process steps:

  • Income inspection and tracking
  • Refurbishment or replacement of:
    • Thermocouples
    • Ceramic components
    • Metal parts
  • Final testing

 

 

Reflectors

Refurbished reflector

Does your reflector not perform well any more? Than send it to SPM!

 

SPM cleans the used surface and applies a new coating. In this way you are able to save up to 60 % of your costs compared to buying a new reflector.

 

 

 

Typical reflectors that are refurbished by SPM are:

  • Fusion reflector for UV cure and bake
  • Mirror for stepper lamps

 

 

Dome refurbishment

SPMs dome refurbishment comprises 4 steps:

  1. Tracking: Each dome has its own tracking number and each step is documented.
  2. Protection: Senstive parts (e.g. sealing surface, electrical contacts) are protected prior to the refurbishment.
  3. Refurbishment: The surface of the dome is cleaned and treated to reach your required specifiation.
  4. Quality control: Prior to the shipping each dome gets tested and checked.

 

 

Surface cleaning by sandblasting

Surface cleaning

SPM is able to clean various surfaces by sandblasting. Different grain materials (e.g. Al2O3, SiC or glass beads) and sizes are used.

Messen / Trade Shows

May 2012 
15.-17.

 E-MRS

Strasbourg, France
22.-25.

OPTATEC

Frankfurt, Germany
June 2012 
19.-21.

 Lope-C

Munich, Germany

September 2012 

11.-12.

PSE 2012 

Garmisch-Partenkirchen, Germany
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