Metal Parts & Special Coatings

Good quality metal parts such as rings, shields and plates for different applications mainly in CVD, PVD and etch systems are available.

In addition SPM offers various types of surface coatings , e.g.:

• Anodization (from 10 to 80 um)
• Y2O3
• Zr2O3/Y2O3
• Al2O3
• Al2O3/TiO2

Longer lifetime of the parts is a key advantage of such coatings. Depending on the application, e.g. passive shields or chuck plates under RF, SPM offers the appropriate coating composition.

Did it happen to you that the nut in your BSR system for LAM Alliance 9600PTX came off? It did also happen with the Upgraded BSR system for LAM Alliance 9600DFMp?

SPM has the right solution for this and other problems with the BSR system for LAM Alliance 9600PTX and the Upgraded BSR System for LAM Alliance 9600 DFMp:

• Elimates scrap risk because the shadow ring cannot touch the wafer
• Uptime improvement: no more down time for early wet cleans
• No capital investment: replace consumables at coming wet clean
• No qualification actions required
• Error reduction: 100 %