Heater

Here you find heaters from CRC Inc. mainly for CVD and etch processes.

The heaters are made out of ceramic or aluminium. The temperature range starts at approximately 200°C with some applications going up to 850°C. Substrate sizes are between 150 and 300 mm (5.9 - 11.8 inch).

Here SPMs Heater product range:

• 300 mm: Ceramic and Aluminium Heater
• 200 mm: Ceramic and Aluminium Heater
• 150 mm: Ceramic and Aluminium Heater

• Special designs, e.g. ceramic-metal-compounds
• Special surface structures and coatings
• Refurbishment of parts such as temperature pobes