Semiconductor Spare Parts

At SPM you find various spare parts for the semiconductor industry.

All products and services offered by SPM reduce your costs. You save money not only with buying the product, but also during your production. This is because SPMs products enhance the efficiency and productivity of your manufacturing process.

The following products and services are currently available at SPM:

• Heater and other components
• Optical parts for Nikon, Canon and ASML stepper
• O-Rings
• Various metal parts (e.g. BSR LAM)
• Lamps and reticle cases
• Refurbishment (e.g. of reflectors)